PiezoMEMS

Advanced Vacuum Deposition Equipment for Metallization

Consumer electronics is developing very dynamically. And the interaction with the environment is playing an increasing role.

This requires sensors and actuators, which in turn require transducers for motion and sound. The applications for microphones, ultrasonic transducers, loudspeakers, microdrives and the like are increasing rapidly. One effect is ubiquitous - the piezo behavior of certain layers.

For you as a manufacturer of piezoelectric sensors or actuators, it is important that the stoichiometry for the piezo effect can be precisely adjusted.

We offer you modular system platforms for the production of these sensors that do just that.