VERA systems are compact, calotte-shaped PVD batch coating systems for evaporation using thermal or electron beam evaporators, as well as ion beam and plasma sources.
The platform offers a high flexibility, including the ability to process various substrate types, perform multilayer coatings, and utilize different technologies. It can be installed as a standalone system directly in the cleanroom or automatically loaded through a cleanroom wall using a handling system.
The VERA platform features flexible configurations tailored to customer-specific requirements, thus ensuring adaptability to various applications in optics, electronics, or semiconductors. Universal substrate compatibility is achieved through the use of segmented domes, pallet, or planetary systems.
With four different chamber sizes, the VERA portfolio offers the appropriate solution for both development projects and high-throughput production. Additionally, the platform includes optical monitoring functions to ensure process quality and control.
from simple thermal evaporation to ion-assisted electron beam evaporation
ranging from compact lab scale to high-volume production
for manual loading or with automatic loading via a handling system
