VICA
Vertical Coating System

The VICA900 system platform, as part of the VICA product family, sets new standards in terms of process and coating versatility. It is designed for production scenarios with medium to high throughput and is consistently optimized for market-leading total cost of ownership.

Thanks to their modular and flexible design, you can configure the systems precisely according to your needs. Particularly note­worthy are the possi­bilities for vertical and double-sided coating, as well as a flexible carrier concept that accommo­dates a wide variety of substrate sizes and materials.

The systems offer high process flexibility for sputtering and evaporation processes as well as various pre- and post-treatment methods. With the inte­gration of the HCLA technology, the VICA900 represents a genuine inno­vation, as this process is being used for the first time in an inline system.

Furthermore, the VICA900 system platform features pre-defined and standard­ized interfaces for corres­ponding auto­mation solutions for loading and unloading.

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Scalable and flexible

through modular design

Unrivaled selection of PVD processes

thanks to diverse technology components

Wide substrate variety

enabled by a flexible carrier concept

VICA900 Mid Volume
  • Basic system for medium throughput
  • Combinations of pretreatment, magnetron sputtering, and HCLA for double-sided coating
  • Compact installation space and modular expandability
VICA900 High Volume
  • Production system with a focus on high throughput and market-leading total cost of ownership
  • Combinations of pretreatment, magnetron sputtering, and HCLA for double-sided coating
  • Modularity for various processes and applications
サポート
Media
First PVD tool for PEM Electrolysis

The first pro­duction coating system for full-size PEM electro­lyzer com­po­nents is about to be in­stalled.

CONTACT
07.05.2026 - 09.05.2026
TiExpo 2026

Shanghai, China

National Exhibition and Convention Center

A006

05.07.2026 - 10.07.2026
SPIE Astronomical Telescopes + Instrumentation 2026

Copenhagen, Denmark

02.09.2026 - 04.09.2026
Semicon Taiwan 2026

Taipeh, Taiwan

Silicon Saxony Pavilion

13.10.2026 - 15.10.2026
Semicon West 2026

San Francisco, CA, USA

Moscone Center

North Hall | Booth 5373

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